Combustion scrubber exhaust gas treatment device

1、 Main features

1. Independent combustion method, complete combustion flame vortex: Combustible toxic gases can be treated at high temperatures from low concentration to 100% concentration;

2. Simultaneous combustion of SiH4 with NF3 and NO2: SiH4 can burn together with NF3 and NO2 in the combustion chamber simultaneously;

3. Safety design of basic functions: In case of abnormal situations, the diagnostic function will automatically handle them safely;

4. The use of scraper method makes dust treatment easy: the attached dust inside the combustion chamber can be easily and reliably removed using an independent scraper;

5. H2 LPG、 Natural gas (LPG) in various forms: Fuel gas can use H2 LPG、 Three types of natural gas (LPG);

6. Simple maintenance: Maintenance can be completed in a very short period of time and the cost is also low;

7. High reliability: With a simple structure and a small number of parts, it is highly reliable.

2、 Combustion type Scrubber special gas exhaust treatment device processes gas types

The types of gases that can be processed include specialty gases used in etching processes and chemical vapor deposition processes in industries such as semiconductors, liquid crystals, and solar energy, mainly including SiH4, SiH2Cl2, PH3, B2H6, TEOS, H2, CO, NF3, SF6, C2F6, WF6, NH3, N2O, etc.

3、 Treatment principle of combustion scrubber exhaust gas treatment device

1. A portion of the cooling air forms a flame vortex inside the combustion chamber, and the process gas is completely drawn into the combustion;

2. Guardian's flame vortex can break down gas bubbles such as SiH4;

3. Cooling air circulates inside the machine, while air cooling is used outside the combustion chamber. And it can cool down the exhaust temperature and discharge various functions such as oxides after combustion;

4. Thermoelectric safety devices can monitor combustion chamber temperature, exhaust temperature, and process gas inlet pipe temperature. In addition, the photo sensor can monitor the engine shutdown, and the differential pressure gauge can check the exhaust air volume.